Design and Modeling of a Single-Mass Biaxial Capacitive Accelerometer Based on the Summit V Process

AuthID
 P-00Z-GW2
3
Author(s)
Serrano Vázquez, F
·
Bandala Sánchez, M
Document Type
Article
Year published
2013
Published
in MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, ISSN: 0946-7076
Volume: 19, Issue: 12, Pages: 1997-2009 (13)
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Publication Identifiers
SCOPUS: 2-s2.0-84890554627
Wos: WOS:000327407000014
Source Identifiers
ISSN: 0946-7076
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