Compliant Mems Mechanism to Extend Resolution in Fourier Transform Spectroscopy

AuthID
 P-00Z-GW6
5
Author(s)
Sauceda Carvajal, A
·
Kennedy Cabrera, HD
·
Hernández Torres, J
·
Mireles, J
2
Editor(s)
Maher,MA;Resnick,PJ
Document Type
Proceedings Paper
Year published
2014
Published
in MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY XIX, ISSN: 0277-786X
Volume: 8973
Indexing
Wos®
Scopus®
Crossref®1
Google Scholar®
Publication Identifiers
Scopus: 2-s2.0-84900493259
Wos: WOS:000336081400023
Source Identifiers
ISSN: 0277-786X
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