Fabrication Process of a Microstructures Based on Hydrogenated Amorphous Sige Films for Applications in Mems Devices

AuthID
 P-00Z-GWC
6
Author(s)
Galindo Mentle, M
·
López Huerta, F
·
Palomino Merino, R
·
Zúñiga Islas, C
·
Calleja Arriaga, W
·
Document Type
Article
Year published
2015
Published
in JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY, ISSN: 1738-494X
Volume: 29, Issue: 4, Pages: 1673-1679 (7)
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Publication Identifiers
SCOPUS: 2-s2.0-84928320850
Wos: WOS:000352685600039
Source Identifiers
ISSN: 1738-494X
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