Analytical Modeling of Mechanical Behavior for Mems/Nems-Based Single-Clamped Multilayer Resonators with Symmetrical Complex Shapes

AuthID
P-00Z-GY4
7
Author(s)
Martínez-Cisneros E.
·
Velosa-Moncada L.A.
·
Elvira-Hernández E.A.
·
González-Esparza D.
·
Aguilera-Cortés L.A.
·
López-Huerta F.
·
Document Type
Article
Year published
2021
Published
in Microsystem Technologies, ISSN: 09467076
Volume: 27, Issue: 5, Pages: 2167-2182 (15)
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Publication Identifiers
Scopus: 2-s2.0-85091003135
Source Identifiers
ISSN: 09467076
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