Estimation of the Young’s Modulus of Nanometer-Thick Films Using Residual Stress-Driven Bilayer Cantilevers

AuthID
P-00Z-H14
5
Author(s)
Velosa-Moncada L.A.
·
Raskin J.P.
·
Aguilera-Cortés L.A.
·
López-Huerta F.
·
Document Type
Article
Year published
2022
Published
in Nanomaterials
Volume: 12, Issue: 2, Pages: 265
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Publication Identifiers
Scopus: 2-s2.0-85125185695
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