Low-Pressure Inductively Coupled Plasmas in Hydrogen: Impact of Gas Heating on the Spatial Distribution of Atomic Hydrogen and Vibrationally Excited States

AuthID
 P-00Z-XM0
8
Author(s)
Smith, GJ
·
Diomede, P
·
Gibson, AR
·
Doyle, SJ
·
Kushner, MJ
·
Gans, T
·
Dedrick, JP
Document Type
Article
Year published
2024
Published
in PLASMA SOURCES SCIENCE & TECHNOLOGY, ISSN: 0963-0252
Volume: 33, Issue: 2, Pages: 025002 (20)
Indexing
Wos®
Scopus®
Crossref®3
Google Scholar®
Publication Identifiers
Scopus: 2-s2.0-85184029008
Wos: WOS:001154851700001
Source Identifiers
ISSN: 0963-0252
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