Pb(Zr,Ti)O3 Thin Films on Zirconium Membranes for Micromechanical Applications

AuthID
P-011-MQZ
7
Author(s)
Maeder T.
·
Muralt P.
·
Sagalowicz L.
·
Reaney I.
·
Kohli M.
·
Setter N.
Document Type
Article
Year published
1996
Published
in Applied Physics Letters, ISSN: 00036951
Volume: 68, Issue: 6, Pages: 776-778 (2)
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Publication Identifiers
Scopus: 2-s2.0-0011989301
Source Identifiers
ISSN: 00036951
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