Single and Dual Ion Implantation of C:si with Fe+ and C+: Microstructural Characterization

AuthID
 P-012-5CX
3
Author(s)
Nunes, B
·
Colaço, R
Document Type
Article
Year published
2015
Published
in Microscopy and Microanalysis, ISSN: 1431-9276
Volume: 21, Issue: S6, Pages: 108-109
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ISSN: 1431-9276
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