Electron Energy Distribution Function in a Microwave Discharge Created by Propagating Surface Waves

AuthID
 P-012-5SM
4
Author(s)
Kortshagen U.
·
Shivarova A.
·
Zamfirov D.
Document Type
Article
Year published
1994
Published
in Journal of Physics D: Applied Physics, ISSN: 00223727
Volume: 27, Issue: 2, Pages: 301-311 (10)
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Publication Identifiers
SCOPUS: 2-s2.0-0028374186
Source Identifiers
ISSN: 00223727
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