Influence of Oxygen on the Iridium Silicide Formation by Rapid Thermal Annealing

AuthID
P-012-FD8
5
Author(s)
FERNANDEZ, M
·
RODRIGUEZ, T
·
ALMENDRA, A
·
JIMENEZLEUBE, J
·
2
Editor(s)
Dawson,LR;Appelbaum,A
Document Type
Proceedings Paper
Year published
1994
Published
in INFRARED DETECTORS - MATERIALS, PROCESSING, AND DEVICES, ISSN: 0272-9172
Volume: 299, Pages: 325-328 (4)
Indexing
Publication Identifiers
Scopus: 2-s2.0-0028026433
Wos: WOS:A1994BB24N00045
Source Identifiers
ISSN: 0272-9172
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