Investigations of Radiation Damage Production in Ion Implanated Silicon

AuthID
 P-013-JNM
4
Author(s)
Glaser E.
·
Götz G.
·
Wesch W.
Document Type
Article
Year published
1982
Published
in physica status solidi (a), ISSN: 00318965
Volume: 69, Issue: 2, Pages: 603-614 (11)
Indexing
Scopus®
Crossref®23
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Publication Identifiers
SCOPUS: 2-s2.0-0020088046
Source Identifiers
ISSN: 00318965
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