Publications

AuthID
P-014-YXA

Author(s)

MAHAJAN, S

MCDEVITT, S

JOHNSON, CJ

Document Type

Proceedings Paper

Year published

1991

Published

in JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, ISSN: 1071-1023

Volume: 9, Issue: 3, Pages: 1892-1896 (5)

Indexing

Wos^®

Crossref^®43

Google Scholar^®

Publication Identifiers

DOI: 10.1116/1.585377

Wos: WOS:A1991FR86600081

Source Identifiers

ISSN: 1071-1023

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