Publications

AuthID
P-014-YXD

Author(s)

HOULDING, VH

MAXWELL, H

CROCHIERE, SM

FARRINGTON, DL

TARTAGLIA, JM

Editor(s)

KATZ,A;MURARKA,SP;NISSIM,YI;HARPER,JME

Document Type

Proceedings Paper

Year published

1992

Published

in ADVANCED METALLIZATION AND PROCESSING FOR SEMICONDUCTOR DEVICES AND CIRCUITS - II, ISSN: 0272-9172

Volume: 260, Pages: 119-124 (6)

Indexing

Wos^®

Crossref^®6

Google Scholar^®

Publication Identifiers

DOI: 10.1557/proc-260-119

Wos: WOS:A1992BX05U00013

Source Identifiers

ISSN: 0272-9172

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