Theoretical and Experimental Investigation of Thermal Stability of Hfo2/Si and Hfo2/Sio2 Interfaces

AuthID
 P-014-YYC
5
Author(s)
Liu, CL
·
Stoker, M
·
Hegde, RI
·
Tobin, PJ
3
Editor(s)
Zavaliangos,A;Tikare,V;Olevsky,EA
Document Type
Proceedings Paper
Year published
2002
Published
in MODELING AND NUMERICAL SIMULATION OF MATERIALS BEHAVIOR AND EVOLUTION, ISSN: 0272-9172
Volume: 731, Pages: 281-284 (4)
Indexing
Wos®
Publication Identifiers
Wos: WOS:000178623800043
Source Identifiers
ISSN: 0272-9172
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