Thermodynamic Stability of High-K Dielectric Metal Oxides Zro2 and Hfo2 in Contact with Si and Sio2

AuthID
 P-014-YYE
7
Author(s)
Gutowski, M
·
Jaffe, JE
·
Liu, CL
·
Stoker, M
·
Hegde, RI
·
Tobin, PJ
Document Type
Article
Year published
2002
Published
in APPLIED PHYSICS LETTERS, ISSN: 0003-6951
Volume: 80, Issue: 11, Pages: 1897-1899 (3)
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Publication Identifiers
Wos: WOS:000174363300014
Source Identifiers
ISSN: 0003-6951
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