Role of Transmission Electron Microscopy in the Semiconductor Industry for Process Development and Failure Analysis

AuthID
 P-014-YZ2
2
Author(s)
Subramanian, S
Document Type
Review
Year published
2009
Published
in PROGRESS IN CRYSTAL GROWTH AND CHARACTERIZATION OF MATERIALS, ISSN: 0960-8974
Volume: 55, Issue: 3-4, Pages: 63-97 (35)
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Publication Identifiers
Wos: WOS:000273379300002
Source Identifiers
ISSN: 0960-8974
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