Nonlinear Effects in the Sputtering of Gallium Arsenide and Silicon by Bismuth Cluster Ions

AuthID
P-015-BYN
5
Author(s)
Mazarov P. A.
·
Ieshkin A. E.
·
Meyer F.
·
Fu D. J.
Document Type
Article
Year published
2022
Published
in Technical Physics Letters, ISSN: 1726-7471
Volume: 48, Issue: 3, Pages: 18
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ISSN: 1726-7471
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