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Molybdenum Precursor Delivery Approaches in Atomic Layer Deposition of Α-Moo3
AuthID
P-015-J09
6
Author(s)
Lorenzo, D
·
Tobaldi, DM
·
Tasco, V
·
Esposito, M
·
Passaseo, A
·
Cuscunà, M
Document Type
Article
Year published
2023
Published
in
Dalton Transactions,
ISSN: 1477-9226
Volume: 52, Issue: 4, Pages: 902-908
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DOI
:
10.1039/d2dt03702e
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ISSN
: 1477-9226
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