Molybdenum Precursor Delivery Approaches in Atomic Layer Deposition of Α-Moo3

AuthID
P-015-J09
6
Author(s)
Lorenzo, D
·
Tasco, V
·
Esposito, M
·
Passaseo, A
·
Cuscunà, M
Document Type
Article
Year published
2023
Published
in Dalton Transactions, ISSN: 1477-9226
Volume: 52, Issue: 4, Pages: 902-908
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ISSN: 1477-9226
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