Functional Nanostructured Titanium Nitride Films Obtained by Sputtering Magnetron

AuthID
P-016-1YP
8
Author(s)
Sánchez, O
·
Hernández Vélez, MH
·
Auger, MA
·
Baldonedo, JL
·
Sanz, R
·
Pirota, KR
·
Vázquez, M
Document Type
Proceedings Paper
Year published
2006
Published
in THIN SOLID FILMS, ISSN: 0040-6090
Volume: 495, Issue: 1-2, Pages: 149-153 (5)
Indexing
Publication Identifiers
Wos: WOS:000233983900027
Source Identifiers
ISSN: 0040-6090
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