Publications

AuthID
P-016-98D

Author(s)

Campo, EM

Fernández, E

Ibañez, E

Barros, L

Nogues, C

Esteve, J

Plaza, JA

Editor(s)

Maher,M;Chiao,J;Resnick,PJ

Document Type

Proceedings Paper

Year published

2009

Published

in SPIE Proceedings - Micromachining and Microfabrication Process Technology XIV, ISSN: 0277-786X

Indexing

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Google Scholar^®

Publication Identifiers

DOI: 10.1117/12.809427

Source Identifiers

ISSN: 0277-786X

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