Sensitivity Improvement of a Microcantilever Based Mass Sensor

AuthID
P-016-98F
8
Author(s)
Narducci, M
·
Figueras, E
·
Gràcia, I
·
Santander, J
·
Ivanov, P
·
Fonseca, L
·
Cané, C
Document Type
Article
Year published
2009
Published
in Microelectronic Engineering, ISSN: 0167-9317
Volume: 86, Issue: 4-6, Pages: 1187-1189
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ISSN: 0167-9317
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