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Mass Spectrometry Improvement on an High Current Ion Implanter
AuthID
P-016-KA7
5
Author(s)
Lopes, J. Gabriel
·
Alegria, F. C.
·
Luis Redondo
·
Rocha, J.
·
Alves, E.
Document Type
Article
Year published
2011
Published
in
Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms,
ISSN: 0168-583X
Volume: 269, Issue: 24
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:
https://hdl.handle.net/10400.21/2212
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ISSN
: 0168-583X
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