Defect Tailoring in Hfo2/Si Films upon Post Deposition Annealing and Ultraviolet Irradiation

AuthID
 P-017-VP4
6
Author(s)
Salas-Rodríguez, S
·
Gonzalez-Moreno, FI
·
Woo-Garcia, RM
·
López-Huerta, F
·
Caballero-Briones, F
Document Type
Unpublished
Year published
2025
Published
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