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TITLE: Breakdown in planar magnetron discharges of argon on copper  Full Text
AUTHORS: Nunes, Y ; Wemans, A; Gordo, PR; Ribau R Teixeira; Maneira, MJP;
PUBLISHED: 2007, SOURCE: 6th Iberian Vacuum Meeting/4th European Topical Conference on Hard Coating in VACUUM, VOLUME: 81, ISSUE: 11-12
INDEXED IN: Scopus WOS CrossRef: 5
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TITLE: Current-pressure characteristics of planar magnetron discharges in rare gases
AUTHORS: Escrivao, ML; Pereira, PJS; Cabral, MH; Teixeira, MR; Maneira, MJP;
PUBLISHED: 2004, SOURCE: JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, VOLUME: 22, ISSUE: 6
INDEXED IN: Scopus WOS