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TITLE: Flexural and torsional vibration modes in low temperature thin-film silicon paddle microresonators  Full Text
AUTHORS: Adrega, T; Chu, V ; Conde, JP ;
PUBLISHED: 2007, SOURCE: APPLIED PHYSICS LETTERS, VOLUME: 90, ISSUE: 23
INDEXED IN: Scopus WOS CrossRef
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TITLE: Performance of thin-film a-Si : H micror,esonators in dissipative media
AUTHORS: Teresa Adrega; Prazeres, DMF ; Chu, V ; Conde, JP ;
PUBLISHED: 2007, SOURCE: Symposium on Amorphous and Polycrystalline Thin-Film Silicon Science and Technology held at the 2006 MRS Spring Meeting in AMORPHOUS AND POLYCRYSTALLINE THIN-FILM SILICON SCIENCE AND TECHNOLOGY 2006, VOLUME: 910
INDEXED IN: Scopus WOS
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TITLE: Thin film silicon MEMS microresonators fabricated by hot-wire chemical vapor deposition  Full Text
AUTHORS: Samadhan B Patil; Adrega, T; Chu, V ; Conde, JP ;
PUBLISHED: 2006, SOURCE: JOURNAL OF MICROMECHANICS AND MICROENGINEERING, VOLUME: 16, ISSUE: 12
INDEXED IN: Scopus WOS CrossRef
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TITLE: Electrostatically actuated resonance of amorphous silicon microresonators in water  Full Text
AUTHORS: Adrega, T; Chu, V ; Conde, JP ;
PUBLISHED: 2006, SOURCE: APPLIED PHYSICS LETTERS, VOLUME: 89, ISSUE: 14
INDEXED IN: Scopus WOS CrossRef
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TITLE: Micromechanical properties of amorphous, nanocrystalline and transition phase hot-wire thin-silicon MEMS  Full Text
AUTHORS: Samadhan B Patil; Teresa Adrega; Alexandra Pimentel; Chu, V ; Conde, JP ;
PUBLISHED: 2006, SOURCE: 21st International Conference on Amorphous and Nanocrystalline Semiconductors in JOURNAL OF NON-CRYSTALLINE SOLIDS, VOLUME: 352, ISSUE: 9-20
INDEXED IN: Scopus WOS CrossRef
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TITLE: Thin-film silicon MEMS DNA sensors  Full Text
AUTHORS: Adrega, T; Prazeres, DMF ; Chu, V ; Conde, JP ;
PUBLISHED: 2006, SOURCE: 21st International Conference on Amorphous and Nanocrystalline Semiconductors in JOURNAL OF NON-CRYSTALLINE SOLIDS, VOLUME: 352, ISSUE: 9-20
INDEXED IN: Scopus WOS CrossRef
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TITLE: Thin-film paddle microresonators with high quality factors fabricated at temperatures below 110 degrees C
AUTHORS: Gaspar, J; Adrega, T; Chu, V ; Conde, JP ;
PUBLISHED: 2005, SOURCE: 18th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) in MEMS 2005 Miami: Technical Digest
INDEXED IN: Scopus WOS
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TITLE: Thin film silicon microbridges for DNA detection
AUTHORS: Adrega, T; Gaspar, J; Fixe, F; Chu, V ; Prazeres, DMF ; Conde, JP ;
PUBLISHED: 2005, SOURCE: Symposium on Micro- and Nanosystems held at the 2005 MRS Spring Meeting in Micro- and Nanosystems-Materials and Devices, VOLUME: 872
INDEXED IN: Scopus WOS
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TITLE: MEMS microresonators based on nanocrystalline silicon
AUTHORS: Gaspar, J; Adrega, T; Chu, V ; Conde, JP ;
PUBLISHED: 2004, SOURCE: Symposium on Amorphous and Nanocrystalline Silicon Science and Technology held at the 2004 MRS Spring Meeting in AMORPHOUS AND NANOCRYSTALLINE SILICON SCIENCE AND TECHNOLOGY- 2004, VOLUME: 808
INDEXED IN: Scopus WOS