W. Bolse
AuthID: R-006-99B
1
TITLE: Epitaxial regrowth of C- and N-implanted silicon and alpha-quartz Full Text
AUTHORS: Harbsmeier, F; Bolse, W; da Silva, MR ; da Silva, MF; Soares, JC ;
PUBLISHED: 1998, SOURCE: 13th International Conference on Ion Beam Analysis (IBA-13) in NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, VOLUME: 136
AUTHORS: Harbsmeier, F; Bolse, W; da Silva, MR ; da Silva, MF; Soares, JC ;
PUBLISHED: 1998, SOURCE: 13th International Conference on Ion Beam Analysis (IBA-13) in NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, VOLUME: 136
