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TITLE: Growth of microcrystalline beta-SiC films on silicon by ECR plasma CVD  Full Text
AUTHORS: Toal, SJ; Reehal, HS; Barradas, NP ; Jeynes, C;
PUBLISHED: 1999, SOURCE: Symposium on Surface Processing - Laser, Lamp, Plasma, at the Annual Spring Meeting of the European-Materials-Society (E-MRS 96) in APPLIED SURFACE SCIENCE, VOLUME: 138, ISSUE: 1-4
INDEXED IN: Scopus WOS CrossRef
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TITLE: Structural analysis of nanocrystalline SiC thin films grown on silicon by ECR plasma CVD  Full Text
AUTHORS: Toal, SJ; Reehal, HS; Webb, SJ; Barradas, NP ; Jeynes, C;
PUBLISHED: 1999, SOURCE: 14th International Vacuum Congress/10th International Conference on Solid Surfaces/5th International Conference on Nanometre-Scale Science and Technology/10th International Conference on Quantitative Surface Analysis in THIN SOLID FILMS, VOLUME: 343, ISSUE: 1-2
INDEXED IN: Scopus WOS CrossRef