1
TITLE: CATHODIC BOMBARDMENT AND SPUTTERING IN THE 0.5-4.0 TORR PRESSURE REGION OF A GLOW-DISCHARGE ION-SOURCE
AUTHORS: MASON, RS; MILTON, DMP; PICHILINGI, M; ANDERSON, PDJ; FERNANDEZ, MT;
PUBLISHED: 1994, SOURCE: RAPID COMMUNICATIONS IN MASS SPECTROMETRY, VOLUME: 8, ISSUE: 2
INDEXED IN: WOS