G. Brooks Keith
AuthID: R-007-3CK
1
TITLE: Fabrication and characterization of PZT thin films for micromotors
AUTHORS: Paul Muralt; Andrei Kholkin; Markus Kohli; Thomas Maeder; Brooks Keith, G; Luthier, R; Setter, N;
PUBLISHED: 1995, SOURCE: Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2) in International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings, VOLUME: 1
AUTHORS: Paul Muralt; Andrei Kholkin; Markus Kohli; Thomas Maeder; Brooks Keith, G; Luthier, R; Setter, N;
PUBLISHED: 1995, SOURCE: Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2) in International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings, VOLUME: 1
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