I. A. Afinogenov


AuthID: R-00F-8TC

Publications Awaiting Confirmation

1
TITLE: Characterization on Contacting Surfaces of MEMS Electrostatic Switches by SEM, EDXA, and XPS
AUTHORS: Afinogenov, IA; Zeltser, IA; Trunin, EB; Tolstoguzov, A;
PUBLISHED: 2015, SOURCE: ADVANCES IN MATERIALS SCIENCE AND ENGINEERING, VOLUME: 2015
INDEXED IN: Scopus WOS CrossRef

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