I. A. Afinogenov
AuthID: R-00F-8TC
1
TITLE: Characterization on Contacting Surfaces of MEMS Electrostatic Switches by SEM, EDXA, and XPS
AUTHORS: Afinogenov, IA; Zeltser, IA; Trunin, EB; Tolstoguzov, A;
PUBLISHED: 2015, SOURCE: ADVANCES IN MATERIALS SCIENCE AND ENGINEERING, VOLUME: 2015
AUTHORS: Afinogenov, IA; Zeltser, IA; Trunin, EB; Tolstoguzov, A;
PUBLISHED: 2015, SOURCE: ADVANCES IN MATERIALS SCIENCE AND ENGINEERING, VOLUME: 2015
