L. de Poucques
AuthID: R-00F-E57
1
TITLE: Coaxial microwave excitation device for magnetron sputtered vapor ionization
AUTHORS: Boisse Laporte, C; Leroy, O; de Poucques, L; Teule Gay, L; Hagelaar, JHA; Kouassi, N; Pagnon, D; Gousset, G; Alves, L; Leprince, P; Bretagne, J; Touzeau, M;
PUBLISHED: 2002, SOURCE: VIDE-SCIENCE TECHNIQUE ET APPLICATIONS, VOLUME: 57, ISSUE: 304
AUTHORS: Boisse Laporte, C; Leroy, O; de Poucques, L; Teule Gay, L; Hagelaar, JHA; Kouassi, N; Pagnon, D; Gousset, G; Alves, L; Leprince, P; Bretagne, J; Touzeau, M;
PUBLISHED: 2002, SOURCE: VIDE-SCIENCE TECHNIQUE ET APPLICATIONS, VOLUME: 57, ISSUE: 304
INDEXED IN: 
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