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TITLE: Ion beam analysis of TiN/Ti multilayers deposited by magnetron sputtering  Full Text
AUTHORS: Andrade, E; Flores, M; Muhl, S; Barradas, NP ; Murillo, G; Zavala, EP; Rocha, MF;
PUBLISHED: 2004, SOURCE: 16th International Conference on Ion Beam Analysis in NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, VOLUME: 219, ISSUE: 1-4
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