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TITLE: Fabrication and characterization of IC-Compatible Linear Variable Optical Filters with application in a micro-spectrometer  Full Text
AUTHORS: Emadi, A; Wu, H; Grabarnik, S; De Graaf, G; Hedsten, K; Enoksson, P; Correia, JH ; Wolffenbuttel, RF;
PUBLISHED: 2010, SOURCE: 23rd Eurosensors Conference in SENSORS AND ACTUATORS A-PHYSICAL, VOLUME: 162, ISSUE: 2
INDEXED IN: Scopus WOS CrossRef