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TITLE: Characterization of hard DC-sputtered Si-based TiN coatings: the effect of composition and ion bombardment  Full Text
AUTHORS: Ribeiro, E; Rebouta, L ; Carvalho, S ; Vaz, F ; Fuentes, GG; Rodriguez, R; Zazpe, M; Alves, E ; Goudeau, P; Riviere, JP;
PUBLISHED: 2004, SOURCE: 31st International Conference on Metallurgical Coatings and Thin Films in SURFACE & COATINGS TECHNOLOGY, VOLUME: 188, ISSUE: 1-3 SPEC.ISS.
INDEXED IN: Scopus WOS CrossRef