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TITLE: Preparation of TiO2 films by CVD method and its electrical, structural and optical properties  Full Text
AUTHORS: Bessergenev, VG ; Khmelinskii, Igor ; Pereira, RJF; Krisuk, VV; Turgambaeva, AE; Igumenov, IK;
PUBLISHED: 2002, SOURCE: 4th Iberian Vacuum Meeting (IVM-4) in VACUUM, VOLUME: 64, ISSUE: 3-4
INDEXED IN: Scopus WOS CrossRef