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TITLE: Hydrogenated Silicon Nitride SiNx:H Deposited by Dielectric Barrier Discharge for Photovoltaics. Hydrogenated Silicon Nitride SiN x :H …   Full Text
AUTHORS: Francoise Massines; Jose Silva; Jean Francois Lelievre; Remy Bazinette; Julien Vallade; Paul Lecouvreur; Sylvain Pouliquen;
PUBLISHED: 2016, SOURCE: PLASMA PROCESSES AND POLYMERS, VOLUME: 13, ISSUE: 1
INDEXED IN: Scopus WOS CrossRef