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TITLE: Quantitative depth profiling of Si1-xGex structures by time-of-flight secondary ion mass spectrometry and secondary neutral mass spectrometry  Full Text
AUTHORS: Drozdov, MN; Drozdov, YN; Csik, A; Novikov, AV; Vad, K; Yunin, PA; Yurasov, DV; Belykh, SF; Gololobov, GP; Suvorov, DV; Tolstogouzov, A;
PUBLISHED: 2016, SOURCE: THIN SOLID FILMS, VOLUME: 607
INDEXED IN: Scopus WOS CrossRef