1
TITLE: Chemical kinetics and energy transfer in moderate pressure H-2 plasmas used in diamond MPACVD processes
AUTHORS: Hassouni, K; Gicquel, A; Capitelli, M; Loureiro, J;
PUBLISHED: 1999, SOURCE: PLASMA SOURCES SCIENCE & TECHNOLOGY, VOLUME: 8, ISSUE: 3
INDEXED IN: Scopus WOS CrossRef