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TITLE: MOS Capacitance Measurements for PEALD TiO2 Dielectric Films Grown under Different Conditions and the Impact of Al2O3 Partial-Monolayer Insertion
AUTHORS: William Chiappim; Marcos Watanabe; Vanessa Dias; Giorgio Testoni; Ricardo Rangel; Mariana Fraga; Homero Maciel; Sebastiao dos Santos Filho; Rodrigo Pessoa;
PUBLISHED: 2020, SOURCE: NANOMATERIALS, VOLUME: 10, ISSUE: 2
INDEXED IN: Scopus WOS