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TITLE: High numerical aperture Hartmann wave front sensor for extreme ultraviolet spectral range
AUTHORS: Lu Li; Jayanath C P Koliyadu; Hannah Donnelly; Domenico Alj; Olivier Delmas; Mabel Ruiz Lopez; Ombeline de la Rochefoucauld; Guillaume Dovillaire; Marta Fajardo; Cangtao T Zhou; Shuangchen C Ruan; Brendan Dromey; Matt Zepf; Philippe Zeitoun;
PUBLISHED: 2020, SOURCE: OPTICS LETTERS, VOLUME: 45, ISSUE: 15
INDEXED IN: WOS