1
TITLE: Substrate temperature influenced ZrO2 films for MOS devices  Full Text
AUTHORS: Paruchuri Kondaiah; Jagadish V J Chandra; Elvira Fortunato; Choi Chel Jong; Mohan M Rao; Rama Koti K Reddy; Uthanna, S;
PUBLISHED: 2020, SOURCE: SURFACE AND INTERFACE ANALYSIS, VOLUME: 52, ISSUE: 9
INDEXED IN: Scopus WOS