Publications

AuthID
P-000-BFB

Author(s)

Teo, EJ

Bettiol, AA

Watt, F

Document Type

Article

Year published

2004

Published

in JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, ISSN: 1071-1023

Volume: 22, Issue: 2, Pages: 560-564 (5)

Indexing

Wos^®

Scopus^®

Crossref^®

Google Scholar^®

Publication Identifiers

DOI: 10.1116/1.1651549

Scopus: 2-s2.0-2342509631

Wos: WOS:000221092300018

Source Identifiers

ISSN: 1071-1023

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