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Cvd And Characterization Of Al-Cu Metallization Thin-Films
AuthID
P-014-YXD
6
Author(s)
HOULDING, VH
·
MAXWELL, H
·
CROCHIERE, SM
·
FARRINGTON, DL
·
RAI, RS
·
TARTAGLIA, JM
4
Editor(s)
KATZ,A;MURARKA,SP;NISSIM,YI;HARPER,JME
Document Type
Proceedings Paper
Year published
1992
Published
in
ADVANCED METALLIZATION AND PROCESSING FOR SEMICONDUCTOR DEVICES AND CIRCUITS - II,
ISSN: 0272-9172
Volume: 260, Pages: 119-124 (6)
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®
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Metadata
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Publication Identifiers
DOI
:
10.1557/proc-260-119
Wos
: WOS:A1992BX05U00013
Source Identifiers
ISSN
: 0272-9172
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