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Non-Aqueous Sol-Gel Routes Applied to Atomic Layer Deposition of Oxides
AuthID
P-003-R16
4
Author(s)
Clavel, G
·
Rauwel, E
·
Willinger, MG
·
Pinna, N
Document Type
Article
Year published
2009
Published
in
JOURNAL OF MATERIALS CHEMISTRY,
ISSN: 0959-9428
Volume: 19, Issue: 4, Pages: 454-462 (9)
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Publication Identifiers
DOI
:
10.1039/b806215c
Scopus
: 2-s2.0-58149520253
Wos
: WOS:000262440400002
Source Identifiers
ISSN
: 0959-9428
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