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Functional Nanostructured Titanium Nitride Films Obtained by Sputtering Magnetron
AuthID
P-016-1YP
8
Author(s)
Sánchez, O
·
Hernández Vélez, MH
·
Navas, D
·
Auger, MA
·
Baldonedo, JL
·
Sanz, R
·
Pirota, KR
·
Vázquez, M
Document Type
Proceedings Paper
Year published
2006
Published
in
THIN SOLID FILMS,
ISSN: 0040-6090
Volume: 495, Issue: 1-2, Pages: 149-153 (5)
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Wos
®
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®
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Metadata
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Publication Identifiers
DOI
:
10.1016/j.tsf.2005.08.203
Wos
: WOS:000233983900027
Source Identifiers
ISSN
: 0040-6090
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