Simultaneous Formation of Silicon Carbide and Diamond on Si Substrates by Microwave Plasma Assisted Chemical Vapor Deposition

AuthID
 P-003-WRE
7
Author(s)
Document Type
Article
Year published
2008
Published
in NEW CARBON MATERIALS, ISSN: 1007-8827
Volume: 23, Issue: 3, Pages: 250-258 (9)
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Publication Identifiers
SCOPUS: 2-s2.0-53649088628
Wos: WOS:000259774500011
Source Identifiers
ISSN: 1007-8827
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