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Construction and Performance of a Magnetron Sputtering Apparatus
AuthID
P-007-4CZ
4
Author(s)
Almeida, JB
·
Ferreira, MIC
·
Santos, MP
·
Ramos, M
Document Type
Article
Year published
1986
Published
in
Nuclear Inst. and Methods in Physics Research, B,
ISSN: 0168-583X
Volume: 18, Issue: 1-6, Pages: 651-654
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Scopus
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Scopus
: 2-s2.0-0022664281
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ISSN
: 0168-583X
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