Planar Magnetron Discharge for Copper Metallisation

AuthID
 P-007-4Y1
5
Author(s)
Massa, PAA
·
Escrivao, ML
·
Document Type
Article
Year published
1989
Published
in Vacuum, ISSN: 0042-207X
Volume: 39, Issue: 7-8, Pages: 862
Conference
Selected Proceedings of the 1St Iberian Meeting on Vacuum and Its Applications, Date: 28 September 1988 through 1 October 1988, Location: Braga, Port
Indexing
Scopus®
Publication Identifiers
Scopus: 2-s2.0-0024939144
Source Identifiers
ISSN: 0042-207X
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