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A Study of Residual Stress on Rf Reactively Sputtered Ruo2 Thin Films

AuthID
P-000-YPV

Author(s)

Meng, LJ

dos Santos, MP

Document Type

Article

Year published

2000

Published

in THIN SOLID FILMS, ISSN: 0040-6090

Volume: 375, Issue: 1-2, Pages: 29-32 (4)

Conference

International-Union-Of-Materials-Research-Societies International Conference on Advanced Materials (Iumrs-Icam 99), Date: JUN 13-18, 1999, Location: BEIJING, PEOPLES R CHINA, Sponsors: Int Union Mat Res Soc

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Publication Identifiers

DOI: 10.1016/s0040-6090(00)01174-3

Scopus: 2-s2.0-0342538899

Wos: WOS:000165067400008

Source Identifiers

ISSN: 0040-6090

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