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Nanocrystalline Silicon Carbon Doped Films Prepared by Hot Wire Technique
AuthID
P-001-6B9
3
Author(s)
Ferreira, I
·
Fernandes, B
·
Martins, R
Document Type
Article
Year published
1999
Published
in
VACUUM,
ISSN: 0042-207X
Volume: 52, Issue: 1-2, Pages: 147-152 (6)
Conference
2Nd European Conference on Hard Coatings (Etchc-2)/3Rd Iberian Vacuum Meeting (3Rd Riva),
Date:
SEP 22-24, 1997,
Location:
LISBON, PORTUGAL,
Sponsors:
Junta Nacl Investigacao Cient & Technol, Empresa Protuguese Aguas Livres, Spanish Vacuum Soc, Portuguese Vacuum Soc
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Publication Identifiers
DOI
:
10.1016/s0042-207x(98)00224-3
SCOPUS
: 2-s2.0-0032762762
Wos
: WOS:000077936500025
Source Identifiers
ISSN
: 0042-207X
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